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Layout and Design of Cleanrooms Across Different Industries

Time : 2025-09-02

I. General Design Principles

Functional Zoning

  • Cleanrooms must be divided into clean zones, semi-clean zones, and auxiliary areas. Functional zones should be independent and physically isolated.

  • Process flows must follow unidirectional principles to avoid cross-contamination between personnel and materials.

  • Core clean areas should be located at the center or upwind side of the building to minimize external interference.

Airflow Organization

  • Unidirectional Flow Cleanrooms: Use vertical laminar flow or horizontal laminar flow with an airflow velocity of 0.3–0.5 m/s. Suitable for high-cleanliness scenarios such as semiconductors and biopharmaceuticals.

  • Non-Unidirectional Flow Cleanrooms: Maintain cleanliness through high-efficiency filtration and dilution, with air change rates of 15–60 times per hour. Suitable for medium-to-low cleanliness scenarios such as food and cosmetics.

  • Mixed Flow Cleanrooms: Combine unidirectional flow in core areas with non-unidirectional flow in peripheral areas to balance cost and efficiency.

Pressure Differential Control

  • The pressure difference between clean and non-clean areas should be ≥5 Pa, and between clean areas and the outdoors ≥10 Pa.

  • Adjacent clean areas should have a reasonable pressure gradient, with higher-pressure zones in higher-cleanliness areas.

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II. Industry-Specific Design Requirements

(1) Semiconductor Industry Cleanrooms

Cleanliness Class

  • Core process areas (e.g., photolithography, etching) must meet ISO 14644-1 Class 1 or Class 10, with particle concentrations ≤3,520 particles/m³ (0.5 μm).

  • Auxiliary areas may have relaxed cleanliness standards of ISO Class 7 or 8.

Temperature and Humidity Control

  • Temperature: 22 ± 1°C, relative humidity: 40%–60%, maintained by constant temperature and humidity HVAC systems.

Anti-Static Design

  • Conductive epoxy flooring or anti-static PVC flooring with resistance ≤1 × 10⁶ Ω.

  • Personnel must wear anti-static clothing and shoe covers; equipment grounding resistance ≤1 Ω.

Layout Example

  • Core process areas are located at the building center, surrounded by equipment and testing rooms.

  • Materials enter through airlocks; personnel enter through air showers.

  • Exhaust systems are independent, with emissions filtered through HEPA before release.

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(2) Biopharmaceutical Industry Cleanrooms

Cleanliness Class

  • Aseptic filling areas must meet Grade A (ISO Class 5), with localized Class 100 conditions.

  • Cell culture and bacterial operation areas must meet Grade B (ISO Class 6).

  • Auxiliary areas (e.g., sterilization rooms, material storage) must meet Grade C (ISO Class 7) or Grade D (ISO Class 8).

Biosafety Requirements

  • Experiments involving highly pathogenic microorganisms must be conducted in BSL-2 or BSL-3 laboratories with negative pressure, interlocked doors, and emergency shower equipment.

  • Sterilization rooms must use fire-resistant, high-temperature-resistant materials and be equipped with steam sterilizers or hydrogen peroxide vaporizers.

Layout Example

  • Bacterial and cell culture rooms are isolated and physically separated from clean filling areas.

  • Materials enter via pass-through windows; personnel enter through changing rooms and buffer zones.

  • Exhaust systems are equipped with HEPA filters and activated carbon adsorption units.

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(3) Food Industry Cleanrooms

Cleanliness Class

  • Ready-to-eat food packaging areas must meet Class 100,000 (ISO Class 8), with particle concentrations ≤3.52 million/m³ (0.5 μm).

  • Raw material handling and non-ready-to-eat food packaging areas must meet Class 300,000 (ISO Class 9).

Temperature and Humidity Control

  • Temperature: 18–26°C, relative humidity ≤75% to prevent microbial growth from condensation.

Layout Example

  • Clean operation areas (e.g., inner packaging) are located upwind; semi-clean areas (e.g., raw material handling) are downwind.

  • Materials enter through buffer rooms; personnel enter through changing rooms and hand-sanitizing areas.

  • Exhaust systems use primary and medium-efficiency filters, with regular filter replacements.

(4) Cosmetics Industry Cleanrooms

Cleanliness Class

  • Emulsification and filling rooms must meet Class 100,000 (ISO Class 8).

  • Raw material storage and packaging areas must meet Class 300,000 (ISO Class 9).

Material Selection

  • Walls use mildew-resistant paint or color steel plates; floors use epoxy self-leveling coatings with sealed seams.

  • Lighting fixtures use sealed cleanroom lamps to prevent dust accumulation.

Layout Example

  • Emulsification and filling rooms are isolated and equipped with localized Class 100 clean benches.

  • Materials enter via pass-through windows; personnel enter through changing rooms and air showers.

  • Exhaust systems use activated carbon adsorption to remove volatile organic compounds.

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III. General Technical Parameters

Noise Control: Noise levels ≤65 dB(A), achieved using low-noise fans and silencers.
Lighting Design: Average illumination ≥500 lx, uniformity ≥0.7, using shadowless lamps or LED cleanroom lights.
Fresh Air Volume: ≥40 m³ per person per hour to compensate for exhaust and maintain positive pressure.

Maintenance Requirements

  • HEPA filters replaced every 6–12 months; primary and medium-efficiency filters cleaned monthly.

  • Floors and walls cleaned and disinfected weekly; equipment surfaces wiped daily.

  • Regular testing for airborne microbes and suspended particles, with records maintained.

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IV. Safety and Emergency Design

Emergency Evacuation

  • Each cleanroom level must have ≥2 emergency exits; evacuation doors open in the direction of escape.

  • Air showers must have bypass doors if occupancy exceeds 5 people.

Fire Protection Facilities

  • Clean areas use gas fire suppression systems (e.g., heptafluoropropane) to avoid water damage.

  • Emergency lighting and evacuation signs must provide ≥30 minutes of backup power.

Emergency Response

  • Biosafety laboratories must have emergency evacuation routes and eyewash stations.

  • Chemical storage areas must have spill containment trays and absorbent materials.

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